| Authors |
Timur O. Zinchenko, Postgraduate student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: scar0243@gmail.com
Ekaterina A. Pecherskaya, Doctor of technical sciences, associate professor, head of sub-department of information and measuring equipment and metrology, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: pea1@list.ru
Vladislav I. Kondrashin, General director, LLC "Paradigma" (57, 2 Voroshilova street, Penza, Russia), E-mail: vlad_kondrashin@mail.ru
Vladimir V. Antipenko, Postgraduate student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: v.antipenko7@yandex.ru
Oleg A. Mel'nikov, Postgraduate student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: oleg-068@mail.ru
Oleg V. Karpanin, Senior lecturer, sub-department of nano-and microelectronics, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: karpanino@mail.ru
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| Abstract |
Background. The development of science and technology has led to the emergence of a huge number of optoelectronic devices. One of the most commonly used layers in the structure of devices is a transparent electrode. For their production, transparent conductive oxides are used, the production process of which is influenced by many different factors. The aim of the study is to identify controllable factors that affect the electrophysical properties of transparent conducting oxides.
Materials and methods. For the synthesis of transparent conducting oxides, the spray pyrolysis method was used. Accordingly, the factors influencing the properties and described in this work directly relate to the technology of aerosol pyrolysis. Tin oxide and antimony-doped tin oxide were used as the material; ordinary window glass was used as the substrate.
Results. The effect of impurity, annealing temperature, coating thickness, pressure in the sprayer, charge carrier mobility, and band gap on the electrophysical properties of transparent conductive coatings has been investigated.
Conclusion. The optimal annealing temperature was found. The reasons for the influence of the above parameters on the electrophysical properties of transparent conducting oxides are established. The zones were established in which the influence of the impurity concentration is positive or negative.
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| Key words |
transparent electrode, transparent conducting oxide, conductivity, surface resistance, impurity, annealing, thickness, pressure in the atomizer, mobility of charge carriers
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